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Method of making a high thermal stability reference structure with out-of-plane anisotropy for magnetic device applications
专利权人:
Headway Technologies, Inc.
发明人:
Wang Yu-Jen,Kula Witold,Tong Ru-Ying,Jan Guenole
申请号:
US201414511273
公开号:
US9466789(B2)
申请日:
2014.10.10
申请国别(地区):
美国
年份:
2016
代理人:
Saile Ackerman LLC `Ackerman Stephen B.
摘要:
Enhanced Hc and Hk in addition to higher thermal stability to 400° C. are achieved in magnetic devices by adding dusting layers on top and bottom surfaces of a spacer in a synthetic antiferromagnetic (SAF) structure to give a RL1/DL1/spacer/DL2/RL2 reference layer configuration where RL1 and RL2 layers exhibit perpendicular magnetic anisotropy (PMA), the spacer induces antiferromagnetic coupling between RL1 and RL2, and DL1 and DL2 are dusting layers that enhance PMA. Dusting layers are deposited at room temperature to 400° C. RL1 and RL2 layers are selected from laminates such as (Ni/Co)n, L10 alloys, or rare earth-transition metal alloys. The reference layer may be incorporated in STT-MRAM memory elements or in spintronic devices including a spin transfer oscillator. A transition layer such as CoFeB/Co may be formed between the RL2 reference layer and tunnel barrier layer in a bottom spin valve design.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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