The present invention relates to an apparatus for sterilization which may be applied to a medical dry sterilizer, and more particularly, to an apparatus which injects hydrogen peroxide so as to generate plasma and OH radicals which are effective in sterilization, so as to achieve the sterilization of a treated object. According to the present invention, the apparatus for sterilization comprises: a sterilizing reactor in which sterilization is performed on a treated object a vacuuming unit which is equipped with a vacuum pump connected to the sterilizing reactor and which vacuumizes the interior of the sterilizing reactor a hydrogen-peroxide supply unit which supplies hydrogen peroxide in a gas state to the interior of the sterilizing reactor and a microwave-plasma generating unit which generates plasma using microwaves. The microwave-plasma generating unit is provided with an electromagnetic-wave generating source which generates microwaves a plasma-generating unit which interconnects the hydrogen-peroxide supply unit and the sterilizing reactor such that hydrogen peroxide is supplied to the sterilizing reactor, and which generates plasma using microwaves and a microwave guide which delivers the microwaves generated from the electromagnetic-wave generating source to the plasma-generating unit.
