Portable power supply for microwave-excited microplasma generation

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专利权人:

浦項工科大學校;産學協力團

发明人:

崔 峻,李 在九,沈 載潤

申请号：

JP2009154820

公开号：

JP5313786B2

申请日:

2009.06.30

申请国别(地区):

JP

年份:

2013

代理人:

摘要：

Provided is a portable power supply apparatus for generating microwave plasma, capable of minimizing a power reflected from a plasma generation apparatus and improving power consumption of the plasma generation apparatus by generating the plasma by using a microwave having a specific frequency, monitoring the power reflected from the plasma generation apparatus after the generation of the plasma, detecting a changed impedance matching condition, and correcting the frequency.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/