Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions
THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
发明人:
Im James S.,van der Wilt Paul Christiaan
申请号：
US201414311570
公开号：
US9466402(B2)
申请日:
2014.06.23
申请国别(地区):
美国
年份:
2016
代理人:
Baker Botts L.L.P.
摘要：
Process and system for processing a thin film sample, as well as at least one portion of the thin film structure are provided. Irradiation beam pulses can be shaped to define at least one line-type beam pulse, which includes a leading portion, a top portion and a trailing portion, in which at least one part has an intensity sufficient to at least partially melt a film sample. Irradiating a first portion of the film sample to at least partially melt the first portion, and allowing the first portion to resolidify and crystallize to form an approximately uniform area therein. After the irradiation of the first portion of the film sample, irradiating a second portion using a second one of the line-type beam pulses to at least partially melt the second portion, and allowing the second portion to resolidify and crystallize to form an approximately uniform area therein. A section of the first portion impacted by the top portion of the first one of the line-type beam pulses is prevented from being irradiated by trail
