THERMAL FLOW SENSORS

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专利权人:

ITRON, INC.

发明人:

SOREEFAN, IBNE

申请号：

EP20140815553

公开号：

EP3077774(A1)

申请日:

2014.12.03

申请国别(地区):

欧洲专利局

年份:

2016

代理人:

摘要：

Thermal flow sensors are disclosed. An example thermal flow sensor includes a chip substrate; a heater mounted to a first membrane on the chip substrate; and a temperature sensor mounted to a second membrane on the chip substrate, the second membrane being isolated from the first membrane by material of the chip substrate.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/