Kazuya MATSUMOTO,Katsuhiro WAKABAYASHI,Jin HIRAOKA,Kazuhisa KARAKI,Mamoru HASEGAWA,Satoshi YOSHIDA
申请号:
US13614168
公开号:
US20130018269A1
申请日:
2012.09.13
申请国别(地区):
US
年份:
2013
代理人:
摘要:
An ultrasound transducer includes a substrate and a lower electrode layer, a lower insulating layer, an upper insulating layer, and an upper electrode layer. The lower insulating layer and the upper insulating layer are arranged to be opposed to each other via an air gap section. The upper insulating layer and the lower insulating layer are different in a material and thickness and satisfy Equation 1 below. In Equation 1, K1 represents a relative dielectric constant of the lower insulating layer, K2 represents a relative dielectric constant of the upper insulating layer, T1 represents thickness of the lower insulating layer, T2 represents thickness of the upper insulating layer, ρ1(x) represents a charge density distribution in the lower insulating layer, and ρ2(y) represents a charge density distribution in the upper insulating layer.