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LOW-DIELECTRIC CONSTANT CRYPTOCRYSTAL LAYERS AND NANOSTRUCTURES
专利权人:
TUBITAK
发明人:
KALEM, SEREF
申请号:
CA20062602365
公开号:
CA2602365(C)
申请日:
2006.02.08
申请国别(地区):
加拿大
年份:
2017
代理人:
摘要:
This invention provides a method for producing application quality low-dielectric constant (low-k) cryptocrystal layers on state-of-the-art semiconductor wafers and for producing organized Nanostructures from cryptocrystals and relates to optical and electronic devices that can be obtained from these materials. The results disclosed here indicate that modification of structure and chemical composition of single crystal matrix using chemical vapor processing (CVP) results in high quality cryptocrystal layers that are homogeneous and form a smooth interface with semiconductor wafer. With this method, growth rates as high as 1 µm/hour can be realized for the dielectric cryptocrystal layer formation. The present invention also provides a method for producing Micro- and Nano-wires by transforming cryptocrystals to organized systems. With this method, Nano wires having dimensions ranging from few nanometers up to 1000 nanometer and lengths up to 50 micrometer can be produced. The cryptocrystals, nanowires and orga
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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