PROBLEM TO BE SOLVED: To obtain a gas sterilization apparatus which continues a sterilization process even when air leakage occurs during the sterilization process.SOLUTION: The gas sterilization apparatus for supplying sterilization gas to the inside of a sterilization tank 1 for performing a sterilization treatment on an article to be sterilized, is equipped with depressurizing means 13 for reducing a pressure in the sterilization tank 1, a pressure sensor 16 for measuring a pressure inside the sterilization tank 1, and a controller 18. In the sterilization process, the depressurizing means 13 is controlled so as to keep the inside of the sterilization tank 1 at a prescribed pressure or lower based on a detected value by the pressure sensor 16, while a concentration of the sterilization gas is calculated and the sterilization time is controlled to be extended in accordance with the calculated concentration of the sterilization gas when the concentration of the sterilization gas is a prescribed concentration or lower.COPYRIGHT: (C)2012,JPO&INPIT【課題】 滅菌工程中にエアリークが発生した場合でも、滅菌工程を続けることができるようにしたガス滅菌装置を得る。【解決手段】 滅菌槽1内へ滅菌ガスを供給し、被滅菌物を滅菌処理するガス滅菌装置であって、滅菌槽1内を減圧する減圧手段13と、滅菌槽1内の圧力を測定する圧力センサ16と、制御器18とを設け、滅菌工程時に、圧力センサ16の検出値に基づき、滅菌槽1内を所定圧力以下に維持するよう減圧手段13を制御するとともに、滅菌ガス濃度を算出して、滅菌ガス濃度が所定濃度以下である場合は、算出された滅菌ガス濃度に応じて滅菌時間を延長するように制御する。【選択図】 図1