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Substrate For Molecular Beam Epitaxy (MBE) HGCDTE Growth
专利权人:
Raytheon Company
发明人:
Peterson Jeffrey M.
申请号:
US201615185561
公开号:
US2016293711(A1)
申请日:
2016.06.17
申请国别(地区):
美国
年份:
2016
代理人:
摘要:
A semiconductor structure having a first semiconductor body having an upper surface with a non <211> crystallographic orientation and a second semiconductor body having a surface with a <211> crystallographic orientation, the surface of the second semiconductor body being bonded to a bottom surface of the first semiconductor body. A layer comprising CdTe is epitaxially disposed on the upper surface of the second semiconductor body. The second semiconductor body is CZ silicon, has a thickness less than 10 microns and has a diameter of at least eight inches. A getter having micro-cavities has a bottom surface formed on an upper surface of the first semiconductor body and has an upper surface bonded to a bottom surface of the second semiconductor body.
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