ULTRASONIC TRANSDUCER DEVICE, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE

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专利权人:

SEIKO EPSON CORPORATION

发明人:

Kanechika KIYOSE,Hironori SUZUKI,Hiroshi MATSUDA

申请号：

US15417875

公开号：

US20170128047A1

申请日:

2017.01.27

申请国别(地区):

US

年份:

2017

代理人:

摘要：

An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film.

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