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Ultrasonic device, probe, electronic device, and ultrasonic imaging apparatus
专利权人:
SEIKO EPSON CORPORATION
发明人:
Kanechika Kiyose,Hiroshi Matsuda,Daisuke Nakanishi
申请号:
US14495145
公开号:
US10042044B2
申请日:
2014.09.24
申请国别(地区):
US
年份:
2018
代理人:
摘要:
An ultrasonic device includes a base in which a base layer of a vibrating film is formed in every opening that is disposed in an array; an interconnect layer, which is a conductor, formed on the base layer; an insulating film that is formed on the interconnect layer, and forms a laminated structure with respect to the base layer; a plurality of piezoelectric elements that are separated from the interconnect layer by the insulating film, the piezoelectric elements each including a first electrode and a second electrode that sandwich a piezoelectric film on the insulating film; and a through conductor that passes through the insulating film, and connects at least one of the first electrode and the second electrode to the conductor constituting the interconnect layer.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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