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MICRO EVAPORATOR, OSCILLATOR INTEGRATED MICRO EVAPORATOR STRUCTURE AND FREQUENCY CORRECTION METHOD THEREOF
专利权人:
SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
发明人:
YANG, Heng,YOU, Weilong,ZHANG, Lei,WANG, Xiaofei,LI, Xinxin
申请号:
WO2016CN70284
公开号:
WO2017088288(A1)
申请日:
2016.01.06
申请国别(地区):
世界知识产权组织国际局
年份:
2017
代理人:
摘要:
Provided are a micro evaporator, an oscillator integrated micro evaporator structure and a frequency correction method thereof. The micro evaporator comprises a micro-evaporation table, anchor points, support beams and metallic electrodes, wherein one surface of the micro-evaporation table is an evaporation surface, the anchor points are located on the two sides of the micro-evaporation table and at a certain distance from the micro-evaporation table, the support beams are located between the micro-evaporation table and the anchor points, with one end connected to the micro-evaporation table and the other end connected to the anchor points. The size of the support beams satisfies the following equation: T=P(L/2kbh)+T a , and the metallic electrodes are located on a first surface of the anchor points. The micro-evaporation table is connected, by means of the support beams, to the anchor points on the surface of which the metallic electrodes are formed. The size of the support beams is set by adjustment suc
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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