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LAMP BASE ADAPTER DESIGN FOR BASELESS LAMPS
专利权人:
Applied Materials, Inc.
发明人:
RANISH Joseph M.,MILLER Aaron,SEREBRYANOV Oleg V.
申请号:
US201615281715
公开号:
US2017105249(A1)
申请日:
2016.09.30
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
Implementations of the present disclosure provide an adapter for use in a processing chamber. In one implementation, the adapter comprises a hollow body having a first end and a second end opposing the first end, a first block and a second block symmetrically disposed within the hollow body about a longitudinal axis of the body, wherein the first block and the second block define a central opening therebetween, and a retention device disposed in contact with the first and second blocks to confine the movement of the first and second blocks with respect to the hollow body. The central opening is sized so that the first block and the second block provide direct contact with a press seal of the lamp.
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