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WAVE SURFACE MEASUREMENT DEVICE AND WAVE SURFACE MEASUREMENT METHOD, AND OBJECT MEASUREMENT DEVICE
专利权人:
CANON INC
发明人:
申请号:
JP20120084441
公开号:
JP2013007740(A)
申请日:
2012.04.03
申请国别(地区):
日本
年份:
2013
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a wave surface measurement device whose resolution of a wave surface is improved. SOLUTION: A wave surface measurement device has: a detection section 3 which detects a signal regarding electric field strength of an electromagnetic wave pulse 1; a delay optical section which delays the electromagnetic wave pulse which reaches the detection section so as to include a first propagation path and a second propagation path with length different from that of the first propagation path in an area different from the first propagation path as propagation paths of the electromagnetic wave pulse; a waveform constitution section 4a which constitutes time waveform of the electromagnetic wave pulse by using the signal regarding the electric field strength detected by the detection section; and a wave surface acquisition section 4b which acquires the wave surface of the electromagnetic wave pulse on the basis of the time waveform of the electromagnetic wave pulse and information regarding the length of the first and second propagation paths in the delay optical section. COPYRIGHT: (C)2013,JPO&INPIT
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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