PROBLEM TO BE SOLVED: To provide an inspection method and a device using a scanning electron microscope capable of performing fine control of a probe accurately and simply. SOLUTION: In order to bring a probe 20a of a manipulator 18a into contact with a prescribed position of a sample 4, the distance in the Z-direction of movement of a stage 16 and movement by the manipulator 18a must be known beforehand. Hereby, the distance in the Z-direction between the surface position of the sample 4 and the position of the probe 20a of the manipulator 18a is required to be measured. An autofocus technology is used for measuring the distance in the Z-direction. Namely, two-dimensional scanning of an electron beam is performed corresponding to a visual field. While performing the two-dimensional scanning of the electron beam, a computer 8 controls a driving circuit 10, and changes the excitation intensity of an objective lens 3 slightly in stepwise. The position of the sample surface and the position in the Z-direction of the probe are revealed based on a two-dimensional electronic signal detected by the two-dimensional scanning of the electron beam. COPYRIGHT: (C)2004,JPO
