Self-heated MEMs based capacitance diaphragm gauge

• 收藏
• 分享

专利权人:

Brooks Instrument, LLC

发明人:

Glaudel Stephen P.,Tinsley Ken

申请号：

US201113316081

公开号：

US9631993(B2)

申请日:

2011.12.09

申请国别(地区):

美国

年份:

2017

代理人:

McGuireWoods LLP

摘要：

The disclosed embodiments include a capacitance diaphragm gauge that includes a self-heated micro-electro-mechanical-system sensor for measuring pressure. The self-heated micro-electro-mechanical-system has at least one integrated heater component and at least one membrane on the self-heated micro-electro-mechanical-system.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/