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VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD USING VAPOR DEPOSITION APPARATUS, AND DEVICE PRODUCTION METHOD
专利权人:
JOLED INC.
发明人:
TAKIGUCHI Akira
申请号:
US201515124145
公开号:
US2017051394(A1)
申请日:
2015.02.24
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
A vapor deposition apparatus including: a chamber that holds an object on which a film is to be deposited through vapor deposition; a vapor deposition source that is disposed inside the chamber, the vapor deposition source having a housing that accommodates therein a vapor deposition material for the vapor deposition; and a heater that heats the vapor deposition material. The housing has a plurality of eject outlets and an air outlet that is openable and closable, the plurality of eject outlets connecting the inside of the housing with the outside of the housing and ejecting vapor of the vapor deposition material towards the object.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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