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Stator element for a Holweck pump stage, vacuum pump with a Holweck pump stage and method of manufacturing a stator element for a Holweck pump stage
专利权人:
PFEIFFER VACUUM GMBH
发明人:
Hofmann, Jan,Mekota, Mirko
申请号:
EP20140159492
公开号:
EP2796726(B1)
申请日:
2014.03.13
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要:
A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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