A method and an apparatus for deodorization using ozone are provided. The apparatus includes an ozone generating and monitoring device, and an ozone tail gas monitoring device. The ozone generating and monitoring device includes an ozone generating device, a power controller, and a programming controller. The power controller is coupled to the ozone generating device to control the production amount of ozone. The programming controller is coupled to the power controller. The ozone tail gas monitoring device is for monitoring the tail gas from an exhaust/wastewater environment as a sample gas, and it includes devices for cooling and dehumidifying the sampled gas and for removing dust and particles of the sampled gas, and an ozone analyzer. The ozone analyzer receives the sample gas and ozone from the ozone generating device for analysis and feeding back different ozone concentration signals to the programming controller, so that the programming controller controls the power controller according to the different ozone concentration signals.一種用臭氧降解除臭的方法與裝置。所述裝置包括臭氧產生監控裝置以及臭氧尾氣監測裝置。臭氧產生監控裝置包括臭氧產生裝置、電力控制器與程序控制器。電力控制器耦接臭氧產生裝置,用以控制臭氧產生量。程序控制器耦接電力控制器。臭氧尾氣監測裝置則是用來監測來自廢氣/廢水環境的尾氣作為採樣氣體,其可包括對採樣氣體進行降溫除濕和除塵除顆粒的裝置以及臭氧分析儀。臭氧分析儀能接收採樣氣體與來自臭氧產生裝置的臭氧進行分析,並反饋不同臭氧濃度訊號至程序控制器,以使程序控制器根據不同臭氧濃度訊號對電力控制器進行控制。