PROBLEM TO BE SOLVED: To manufacture a large-sized lithium target in which, for example, the diameter×thickness of a conjugate of an Li membrane/Cu cooling base is settled within the range of φ20 mm to 40 mm×100 to 200 μm±10 μm.SOLUTION: A manufacturing method of a lithium target includes the steps of: placing, on a hot plate, a Cu cooling base constituting the lithium target heating the Cu cooling base in a nitrogen containing atmosphere by means of the hot plate with the precision of 20 to 70°C±0.1°C placing an Li membrane on the Cu cooling base while heating the Cu cooling base by means of the hot plate, and temporarily bonding both the Li membrane and the Cu cooling base by pressing them using a roller and then detaching a conjugate of the Li membrane/Cu cooling base from the hot plate and joining both the Li membrane and the Cu cooling base within several seconds under the condition that the pressure is 15 to 25 MPa and the temperature is within the range of 20 to 70°C±0.1°C.COPYRIGHT: (C)2014,JPO&INPIT【課題】例えば、Li薄膜/Cu冷却基盤の接合体の直径×膜厚がφ20mm~40mm×100~200μm±10μmの範囲にあるような大型のリチウムターゲットを製造すること。【解決手段】リチウムターゲットを構成するCu冷却基盤をホットプレート上に載せる工程と、窒素雰囲気内において、前記Cu冷却基盤をホットプレートにより20~70℃±0.1℃の精度で加熱する工程と、前記Cu冷却基盤をホットプレートで加熱しながら、Li薄膜を前記Cu冷却基盤上に載置し、両者をローラでプレスして仮接着する工程と、その後、前記Li薄膜/Cu冷却基盤の接合体を、前記ホットプレートから外し、数秒以内にプレス圧15~25MPaでかつ温度20~70℃±0.1℃以内の条件下で両者を接合させる工程を備える。【選択図】図4
