PROBLEM TO BE SOLVED: To easily prevent mixing of the light used far an AFM (inter-atmomic force microscope)-dedicated optical system with the detection light of an NSOM (near field scanning optical microscope), etc., by easily securing a space for placing an objective lens required for the optical microscope for selecting a measuring area in a sample, coping with it. SOLUTION: A probe 3 is made to scan while it keeps a certain distance from a sample 15. For controlling them, the detection light of an NSOM from the probe 3 is used. Since the light of optical near field interaction from the probe 3 is used, the other light source is not required, and there is no spatial constraint on an objective lens caused by installation of the other optical system, and an objective lens 4 of high magnification can easily be used, and alignment of the sample 15 is easily performed. Both the change of relative distance between the emission position of the light emitted from the probe 3 and a detection optical system, or the change of emission direction of light can be applied for detecting the displacement of the probe 3.
