PROBLEM TO BE SOLVED: To provide an X-ray imaging apparatus which can two-dimensionally restore front waves by suppressing influence of transmittance distribution of an object to be inspected with high spatial resolution and illumination irregularities of a light source in the number of pixels smaller than the conventional technology.SOLUTION: The X-ray imaging apparatus has: an X-ray source a diffraction grating for cyclically modulating the phase or intensity of an incident X-ray in mutually orthogonal two directions just before or just behind the object to be inspected a moving means for changing an in-face position of the diffraction grating to move a cycle of intensity distribution in both the directions of cyclic directions of the orthogonal two directions by only 1/2 an X-ray detector for detecting intensity distribution generated with Talbot effect and an arithmetic device for obtaining phase information of an X-ray incident on the diffraction grating from the intensity distribution obtained with the X-ray detector. The arithmetic device cuts out a frequency component in the cycle of the intensity distribution from a spatial frequency spectrum of a difference between obtained two imaging intensity distributions and inverse-Fourier-transforms the obtained frequency component to calculate differential phase distribution.COPYRIGHT: (C)2011,JPO&INPIT【課題】従来技術より少ない画像数で、空間分解能が高く被検査物の透過率分布と光源の照明むらの影響を抑制し、2次元的に波面を復元することが可能なX線撮像装置を提供する。【解決手段】X線源と、被検査物の直前または直後にあって、入射するX線の位相もしくは強度を互いに直交する2方向に周期的に変調する回折格子と、直交する2方向の周期方向の両方向に強度分布の周期を2分の1だけ移動するように回折格子の面内位置を変化させる移動手段と、タルボ効果によって生じる強度分布を検出するX線検出器と、X線検出器で取得された強度分布から、回折格子に入射したX線の位相情報を取得する演算装置とを有し、演算装置が、取得された2枚の撮像強度分布の差分の空間周波数スペクトルから強度分布の周期における周波数成分を切り出し、得られた周波数成分を逆フーリエ変換して微分位相分布を算出するX線撮像装置を構成する。【選択図】 図1
