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ACCELERATION SENSOR HAVING SPRING FORCE COMPENSATION
专利权人:
NORTHROP GRUMMAN LITEF GMBH
发明人:
KOENIG STEFAN,LEINFELDER PETER
申请号:
US201615547312
公开号:
US2018024160(A1)
申请日:
2016.01.27
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, au electrostatic three acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).
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