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DETECTING CHARGED PARTICLES
专利权人:
Carl Zeiss Microscopy Ltd.
发明人:
Guerra Diego
申请号:
US201615364396
公开号:
US2017162364(A1)
申请日:
2016.11.30
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
The system described herein detects charged particles which, for example, are generated by interaction of a charged particle beam with an object to be analyzed using, for example, a particle beam device. Detection is carried out for imaging of the object. The system described herein allows detection of charged particles with the same detection principle when the ambient pressures in an object chamber are in a first pressure range being lower than or equal to 10−3 hPa or in a second pressure range being equal to or above 10−3 hPa. When operating with the object chamber in the second pressure range, the system described herein generates photons in a scintillator using cascade particles generated by using the charged particles and a gas, and detects the photons using a light detector.
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