A film process-based preparation method for a radio frequency identification tag, wherein the radio frequency identification tag mainly comprises an antenna, an analog front end, a clock and digital logic circuit, and an EEPROM memory circuit, wherein the EEPROM memory circuit comprises a storage device and a peripheral read and write circuit, the antenna mainly comprises metal coils, the analog front end and the clock and digital logic circuit comprise conventional thin film transistors, and the EEPROM memory circuit mainly comprises conventional thin film transistors and memory thin film transistors. Provided is a method that employs the film process to integrally prepares, on the same substrate, the entire radio frequency identification tag comprising four parts: an antenna, an analog front end, a clock and digital logic circuit, and an EEPROM memory circuit. The method is capable of overcoming the drawbacks of traditional RFID tags, wherein, among others, the cost of integration between IC chips and exter
