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X線用位相格子及びその製造方法
专利权人:
キヤノン株式会社
发明人:
佐藤 玄太
申请号:
JP2009195445
公开号:
JP5586899B2
申请日:
2009.08.26
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
An X-ray phase grating used for X-ray phase-contrast imaging based on Talbot interference includes a first substrate and a second substrate. The first substrate and the second substrate are combined so as to be shifted from each other by one half period. The first substrate has a first pattern in which first faces and second faces making an angle of &alpha (where &alpha&ne0 and &alpha&ne90°) with the first faces are periodically arranged. The second substrate has a second pattern in which third faces corresponding to the first faces and fourth faces corresponding to the second faces and making an angle of &alpha with the third faces are periodically arranged.
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