PROBLEM TO BE SOLVED: To provide a sample-structure analysis method and a sample-structure analysis device, which enable accurate analysis of the structure of a sample on its surface and in its thickness direction. SOLUTION: An analysis device includes: a stage 103 on which a sample 200 is placed; an x-ray irradiator 101; an x-ray detector 102; a needle electrode 105; a laser irradiation device 106 for scanning with a laser in synchronous with the needle electrode 105; a vacuum chamber 121 for accommodating at least the stage 103, the sample placed thereon and the needle electrode 105; and a power supply device 108. Further, the analysis device is controlled to perform alternately the steps of: irradiating the sample 200 with an x-ray 111 to detect an x-ray 112 refracted in the sample with the x-ray detector 102; and applying a high-voltage and a laser 113 to the sample 200 to cause field strength and laser power generated between the needle electrode 105 and sample 200 to dig the sample surface with electric field evaporation. COPYRIGHT: (C)2013,JPO&INPIT
