The Trustees Of Columbia University In The City Of New York
发明人:
Chen Changyao,Hone James,Lee Sunwoo
申请号：
US201414522534
公开号：
US2017025998(A1)
申请日:
2014.10.23
申请国别(地区):
美国
年份:
2017
代理人:
摘要：
A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.
