NAM, Kyung Hoon,KIM, Sang Joon,KO, Kyoung Pil,KIM, Tae Yeob,EOM, Mun Jong
申请号：
WO2016KR14637
公开号：
WO2017111384(A1)
申请日:
2016.12.14
申请国别(地区):
世界知识产权组织国际局
年份:
2017
代理人:
摘要：
The present invention relates to a vacuum deposition device for high-speed coating, comprising: a vacuum chamber having a reception space arranged therein; an evaporation crucible disposed in the reception space to evaporate a coating material; and a cyclone filter disposed in the reception space, wherein the cyclone filter separates a coarse particle and steam generated during the evaporation of the coating material. Therefore, the vacuum deposition device for high-speed coating can remove a coarse particle generated in the high-speed coating, prevent the rotation of steam, using a baffle inserted between a steam ejection opening and an exit of the cyclone filter, and thus obtain a coating layer having the excellent uniformity of coating.
