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LASER MICRO/NANO PROCESSING SYSTEM AND METHOD
专利权人:
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
发明人:
DUAN, Xuanming,CHEN, Shu,CAO, Hongzhong,DONG, Xianzi,ZHAO, Zhensheng
申请号:
EP20110826307
公开号:
EP2620249(A4)
申请日:
2011.09.15
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
A laser micro/nano processing system (100, 200, 300, 400) comprises: a laser light source used to provide a first laser beam having a first wavelength and a second laser beam having a second wavelength different from the first wavelength, with the pulse width of the first laser beam being in the range from a nanosecond to a femtosecond; an optical focusing assembly used to focus the first laser beam and the second laser beam to the same focal point; and a micro mobile platform (21) controlled by a computer. Also disclosed are a method for micro/nano-processing photosensitive materials with a laser and a method for fabricating a device with a micro/nano structure using laser two-photon direct writing technology. In the system and methods, spatial and temporal overlapping of two laser beams is utilized, so as to obtain a micro/nano structure with a processing resolution higher than that of a single laser beam, using an average power lower than that of a single laser beam.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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