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Method and device for characterizing an electron beam using an X-ray detector with a patterned aperture resolver and patterned aperture modulator
专利权人:
Arcam AB
发明人:
Tomas Lock
申请号:
US14973244
公开号:
US09406483B1
申请日:
2015.12.17
申请国别(地区):
US
年份:
2016
代理人:
摘要:
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.
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