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Interferometer device and interferometry
专利权人:
セーエスウーエム、サントル、スイス、デレクトロニック、エ、ド、ミクロテクニック、ソシエテ、アノニム、ルシェルシュ、エ、デブロプマン
发明人:
クリスティアン、コットラー,ロルフ、カオフマン
申请号:
JP2008293492
公开号:
JP5583336B2
申请日:
2008.11.17
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
The present invention discloses an interferometer device (500) and method. In embodiments , the device comprises an electromagnetic radiation source (510) emitting radiation having a first mean wavelength » LE ; a phase grating (522) having a first aspect ratio; an absorption grating (523) having a second aspect ratio; and a detector (540). The electromagnetic radiation source, the phase grating, the absorption grating and the detector are radiatively coupled with each other. The absorption grating is positioned between the detector and the phase grating; the electromagnetic radiation source is positioned in front of the phase grating; and the phase grating is designed such to cause a phase shift that is smaller than À on the emitted radiation. Additional and alternative embodiments are specified and claimed.
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