荷電粒子線照射装置
- 专利权人:
- 株式会社東芝
- 发明人:
- 菊 地 淳 史,前 田 和 孝,金 井 芳 治,永 渕 照 康
- 申请号：
- JP2009166480
- 公开号：
- JP5321826B2
- 申请日:
- 2009.07.15
- 申请国别(地区):
- JP
- 年份:
- 2013
- 代理人:
- 摘要：
To provide a charged particle beam irradiation device, capable of reducing dispersion of irradiated beam particles and achieving excellent vacuum atmosphere retaining performance.
SOLUTION: The charged particle beam irradiation device includes a beam takeout window 14 composed in double structure comprising a particle beam permeable membrane 101, a connecting duct 104, and a particle beam permeable membrane 102. Dispersion of irradiated beam particles is thus reduced and vacuum atmosphere retaining performance in the charged particle beam irradiation device is improved.
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- 来源网站：
- 中国工程科技知识中心
