PROBLEM TO BE SOLVED: To provide a transmission electron microscope in which influences of a magnetic field on a specimen can be reduced when observing a transmission electron micrographic image. SOLUTION: A transmission electron microscope 100 comprises: an electron beam source 2; an illumination lens 4; an objective lens 6; a second objective lens 8; a selected-area aperture 16; a projection lens 10; a detector 12; and a control section which controls at least the illumination lens 4, the second objective lens 8, and the projection lens 10. A first plane 17 is positioned between the second objective lens 8 and the projection lens 10, and the control section 22 performs first processing for controlling the illumination lens 4 to illuminate a specimen S with electron beams L, controlling the second objective lens 8 to image a diffraction pattern of the specimen S on the first plane 17, and controlling the projection lens 10 to form a transmission electron micrographic image of the specimen S imaged by the second objective lens 8 on a second plane (photo-detection section 13). COPYRIGHT: (C)2013,JPO&INPIT
