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FLUID DELIVERY DEVICE WITH HYDROPHOBIC SURFACE
专利权人:
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人:
YANG LIU,STEVEN L. WRIGHT
申请号:
US16594390
公开号:
US20200032925A1
申请日:
2019.10.07
申请国别(地区):
US
年份:
2020
代理人:
摘要:
Embodiments of the present invention are directed to a liquid delivery apparatus. A non-limiting example of the apparatus includes a substrate including a cavity formed in a surface of the substrate. The apparatus can also include a membrane disposed on the surface of the substrate covering an opening of the cavity. The apparatus can also include a hydrophobic layer disposed on the membrane. The apparatus can also include a seal disposed between the membrane and the substrate, wherein the seal surrounds the opening of the cavity. The apparatus can also include an electrode layer coupled to the membrane.
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