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Fluid delivery device with hydrophobic surface
专利权人:
International Business Machines Corporation
发明人:
申请号:
GB202001766
公开号:
GB202001766D0
申请日:
2018.07.16
申请国别(地区):
GB
年份:
2020
代理人:
摘要:
Embodiments of the present invention are directed to a liquid delivery apparatus. A non-limiting example of the apparatus includes a substrate including a cavity formed in a surface of the substrate. The apparatus can also include a membrane disposed on the surface of the substrate covering an opening of the cavity. The apparatus can also include a hydrophobic layer disposed on the membrane. The apparatus can also include a seal disposed between the membrane and the substrate, wherein the seal surrounds the opening of the cavity. The apparatus can also include an electrode layer coupled to the membrane.
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中国工程科技知识中心
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