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Treatment liquid production device and treatment liquid production method
专利权人:
发明人:
Katsumi Imada,Mariko Miyashita,Yoshiko Miyamoto
申请号:
US14723504
公开号:
US10105673B2
申请日:
2015.05.28
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A treatment liquid production device includes a first tank a first plasma generating device that includes a first pair of electrodes and a first power supply, the first power supply applying a voltage between the first pair of electrodes, the first plasma generating device generating plasma in a liquid in the first tank a second tank a second plasma generating device that includes a second pair of electrodes and a second power supply, the second power supply applying a voltage between the second pair of electrodes, the second plasma generating device generating plasma in a liquid in the second tank and a controller operative to produce a first treatment liquid having a high initial oxidizing power during a first period and a second treatment liquid having a high remaining oxidizing power during a second period which is longer than the first period.
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