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CAPACITIVE SENSOR AND COMBINED CAPACITIVE DISPLACEMENT MEASUREMENT SENSING SYSTEM
专利权人:
LIN, LI
发明人:
LIN, LI
申请号:
EP20140866749
公开号:
EP3076136(A1)
申请日:
2014.11.26
申请国别(地区):
欧洲专利局
年份:
2016
代理人:
摘要:
A capacitive sensor (100) and a combined capacitive displacement measurement sensing system consists of at least one STATORs (104, 105) comprising a first capacitance electrode set (11; or 13) with m electrically connected conductive electrodes (11-1, 11-2,...11-n,...11-m; or 13-1,13-2,...13-n,...13-m) and a second capacitance electrode set (12; or 14) with m electrically connected conductive electrodes (12-1, 12-2,...12-n,...12-m; or 14-1,14-2,...14-n,...14-m). One of corresponding first set and one of corresponding second set (11 and 12, or 13 and 14) of electrodes are arranged alternately at preset distances on electrically insulated substrates (17, 19). In addition, the capacitive sensor (100) consist of at least one MOVER (106) comprising one or more sets of ground electrodes (15-1, 15-2,...15-n; or 16-1,16-2,...16-n). Corresponding capacitive electrodes of the STATORs (104, 105) and the ground electrodes of the MOVER (106) form capacitors. The MOVER (106) moves relatively to the STATORs (104,105) in a c
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