NANONIMPRINT LIQUID MATERIAL, METHOD FOR MANUFACTURING NANOIMPRINT LIQUID MATERIAL, METHOD FOR MANUFACTURING CURED PRODUCT PATTERN, METHOD FOR MANUFACTURING OPTICAL COMPONENT, AND METHOD FOR MANUFACTURING CIRCUIT BOARD

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专利权人:

CANON KABUSHIKI KAISHA

发明人:

Kato Jun,Honma Takeshi,Ito Toshiki

申请号：

US201615553938

公开号：

US2018039170(A1)

申请日:

2016.02.23

申请国别(地区):

美国

年份:

2018

代理人:

摘要：

A nanoimprint liquid material in which the particle number concentration of particles having a particle diameter of 0.07 μm or more is less than 310/mL is provided.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/