Disclosed is a plasma sterilization apparatus including a chamber including a sterilization target, a vaporizer heating air, a vacuum unit discharging moisture and cold air from the chamber to the outside, an air supply unit injecting heated air into the chamber, and a control unit controlling the air supply unit to inject air heated by the vaporizer into the chamber, controlling the vacuum unit to discharge air to the outside until an internal pressure of the chamber becomes a firstly set pressure, and controlling the air supply unit to inject heated air into the chamber until the internal pressure of the chamber becomes a secondly set pressure.
