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Atmospheric pressure plasma generator
专利权人:
株式会社FUJI
发明人:
神藤 高広
申请号:
JP2017537133
公开号:
JP6587689B2
申请日:
2015.09.02
申请国别(地区):
JP
年份:
2019
代理人:
摘要:
Plasma emitting device 10 is provided with main body section 12, pair of electrodes 14 and 16, gas supply device 20, and laser emitting device 22. Gas supply device 20 supplies processing gas insider main body section 12. Then, voltage is applied to electrodes 14 and 16 such that electrical discharge occurs between electrodes 14 and 16, which causes the processing gas flowing inside cylindrical section 23 of main body section 12 to be plasmarized. Accordingly, plasma emitted from the opening on the end surface of cylindrical section 23 opposite to the end to which laser emitting device 22 is connected is emitted in an axial direction of cylindrical section 23. Also, laser emitting device 22 emits laser light in an axial direction of cylindrical section 23. Accordingly, due to the light, it is possible to visually check the plasma emission position, and it is possible to appropriately apply plasma to a target body.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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