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STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE
专利权人:
Taiwan Semiconductor Manufacturing Co., Ltd.
发明人:
CHANG Che-Cheng,LIN Chih-Han
申请号:
US201514930231
公开号:
US2017125594(A1)
申请日:
2015.11.02
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate and a gate stack covering a portion of the fin structure. The gate stack includes a gate dielectric layer, a work function layer, and a conductive filling over the work function layer. The semiconductor device structure also includes a dielectric layer covering the fin structure. The dielectric layer is in direct contact with the conductive filling.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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