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Appareil tomographique optique et son procédé de commande
专利权人:
CANON KABUSHIKI KAISHA
发明人:
申请号:
EP13152656.8
公开号:
EP2620097A1
申请日:
2013.01.25
申请国别(地区):
EP
年份:
2013
代理人:
摘要:
In order to change a size of an imaging area of a tomographic image of an object to be inspected easily, an optical tomographic apparatus (200) is provided for acquiring a tomographic image of an object to be inspected, the optical tomographic apparatus including a control means (925) for controlling a measuring light path length changing means (900) to change an optical path length of measuring light in a case where the size of the imaging area of the tomographic image is changed, and for controlling a movable means for moving a focus lens for focusing the measuring light to the object to be inspected along an optical path to move the focus lens in association with the change in the optical path length of the measuring light.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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