PARTLO, WILLIAM, N.,SANDSTROM, RICHARD, L.,BROWN, DANIEL, J.W.,FOMENKOV, IGOR, V.
申请号：
EP11832920
公开号：
EP2624913A4
申请日:
2011.09.06
申请国别(地区):
EP
年份:
2014
代理人:
摘要：
A device is disclosed herein which may comprise a droplet generator producing droplets of target material； a sensor providing an intercept time signal when a droplet reaches a preselected location； a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal； a laser source responsive to a trigger signal to produce a laser pulse； and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet.
