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SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPY
专利权人:
OLYMPUS CORPORATION
发明人:
SAKAI, NOBUAKI
申请号:
EP20140778892
公开号:
EP2982992(A4)
申请日:
2014.03.17
申请国别(地区):
欧洲专利局
年份:
2016
代理人:
摘要:
A scanning probe microscope includes a vibration unit (14) to vibrate the cantilever (12) on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever (12), a phase adjustment unit (30) to provide a phase offset to a phase difference between the vibration signal and the displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference between the vibration signal and the displacement signal and the phase offset, and a control unit (25) to control the distance between the probe (11) and the sample (19) on the basis of the phase signal. The phase adjustment unit (30) combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe (11) and the sample (19) are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (À/2 [rad]), and then provides a combined amount to the phase
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中国工程科技知识中心
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