The microplasma micro passage reaction equipment of preferred module includes that micro channel array is arranged to relative to electrode, to generate plasma, and by dielectric from above-mentioned electrode. In the central micro channel array of lid, while the end for leaving micro channel array is exposed. Gas access and products export are arranged to allow access into, pass through and leave micro channel array. Reactor module of the invention includes multiple modular reactor equipment. Reactor assembly can be by a shell or frame and fluid communication. System of the invention is arranged in multiple modules. Preferred module casing frame and reactor include structure feature, with creation alignment and connection. Preferred module includes fan so as to recycle feed and reaction product. Other reactor apparatus provide plasma actuating stream.
