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Moire interferometry system and method with extended imaging depth
专利权人:
INSUTRIAL TECHNOLOGY INSTITUTE
发明人:
HARDING, KEVIN G.
申请号:
US19970898647
公开号:
US5835218(A)
申请日:
1997.07.22
申请国别(地区):
美国
年份:
1998
代理人:
摘要:
A moire interferometry system and method are provided for achieving full field surface contouring with an extended depth of view of image. The moire interferometry system includes a projection system generally made up of a light source, imaging lens and a square wave grating pattern. The imaging lens is configured to filter higher order light rays passing through the square wave grating pattern so as to project a sine wave like pattern onto a desired surface. The moire interferometry system also includes a viewing system generally made up of an imaging lens, a submaster grating and a camera. The submaster grating is preferably a customized grating that may be produced by recording a grating pattern in relation to a reference surface. The camera is able to view an image anywhere within the extended depth of image and analyze the moire fringes. A determination of deviation between a test part and a reference surface provides a part inspection system.
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