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Optical image capturing module, aligning method, and observing method
专利权人:
METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
发明人:
Lin Shi-Wei,Yang Chun-Ming,Wen Chih-Chin,Lin Chorng-Tyan
申请号:
US201414455240
公开号:
US9459460(B2)
申请日:
2014.08.08
申请国别(地区):
美国
年份:
2016
代理人:
WPAT, PC `King Justin`Chiang Jonathan
摘要:
A method of aligning an upper substrate and a lower substrate is provided. The upper and lower substrates are oppositely arranged, and the aligning method includes the following steps: providing an optical image capturing module; emitting light rays to a third surface of a first prism; filtering the light rays, so that the light rays are divided into light rays at the first wavelength range and light rays at the second wavelength range, wherein the light rays at the first wavelength range irradiate a pattern on the upper substrate, and light rays at the second wavelength range irradiate a pattern on the lower substrate; reflecting a pattern image on the upper substrate to an image capturing apparatus; reflecting a pattern image on the lower substrate to the image capturing apparatus; and determining locations of the patterns of the upper and lower substrate that are on the image capturing apparatus.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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