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Continuously scanning XY translation stage
专利权人:
Nanotronics Imaging, Inc.
发明人:
Putman Matthew C.,Putman John B.
申请号:
US201113985386
公开号:
US9561566(B2)
申请日:
2011.02.15
申请国别(地区):
美国
年份:
2017
代理人:
Renner Kenner Greive Bobak Taylor & Weber
摘要:
An XY translation stage includes a primary drive mechanism and a stage drive assembly. The primary drive mechanism rotates the stage drive assembly about an axis of rotation. The XY translation stage also includes an object stage that orbits freely in a defined plane without rotation of the object stage out of that defined plane. A stage pin associates the stage drive assembly with the object stage such that rotational movement of the stage drive assembly yields orbital movement of the object stage within the defined plane. The positioning of the stage pin relative to the axis of rotation is adjustable such that the diameter of the orbital movement of the object stage is adjustable.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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