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METHOD FOR PRODUCING A FLOW SENSOR BASED ON A THIN FILM, AND SUCH A FLOW SENSOR
专利权人:
ROBERT BOSCH GMBH
发明人:
GROSS, David,UTERMOEHLEN, Fabian
申请号:
WO2016EP78393
公开号:
WO2017108300(A1)
申请日:
2016.11.22
申请国别(地区):
世界知识产权组织国际局
年份:
2017
代理人:
摘要:
The invention relates to a method for producing a flow sensor (1) based on a thin film, having a first heater and temperature measuring element (10) and at least one second heater and temperature measuring element (11). The heater and temperature measuring elements (10, 11) are spatially separated from each other, and a support structure (21) is provided which is designed to receive the heater and temperature measuring elements (10, 11). According to the invention, the production method has at least the following steps: providing a substrate (100); depositing a first photoresist (12) onto the substrate (100); depositing a second photoresist (13) onto the first photoresist (12); opening the first (12) and second photoresist (13) in order to produce a connection metallization; depositing a metal (14) in order to form the heater and temperature measuring elements (10, 11); structuring the deposited metal (14); and depositing a third photoresist (15) and removing the first photoresist (12) by means of at least on
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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